磁悬浮转子微陀螺的微细加工工艺研究  

Research on Micromachining Process of MicromachinedGyroscope with Electromagnetically Levitated Rotor

作　　者：吴校生[1] 陈文元[1] 赵小林[1] 张卫平[1] 何淼[1] 

机构地区：[1]上海交通大学微纳米科学技术研究院薄膜与微细技术教育部重点实验室微米纳米加工技术国家级重点实验室,上海200030

出　　处：《微细加工技术》2004年第1期68-72,共5页Microfabrication Technology

基　　金：863计划(2002AA745120);上海市科委2002年重大项目"微机电系统"中的子项目---"先进惯性传感器

摘　　要：介绍了磁悬浮转子微陀螺的工作原理及有关的微细加工工艺。磁悬浮转子微陀螺的平面线圈是采用光刻、电镀及溅射等微细加工方法来实现的,微转子的加工有冲压、蒸铝沉积等方法,其中冲压能得到质量较好的微转子;上壳体采用体硅腐蚀来制作。初步的实验表明该方案是行之有效的。Depending on the characteristics of small volume,light weight and low price, the micromachined gyroscope is coming into people's daily life. Micromachined gyroscope with electromagnetically levitated rotor (MGELR) is a new kind one,which is based on working mechanism of conventional gyroscope. High resolution is hopeful to be obtained in MGELR. The micromachining technique of MGELR provides the important base for its structure design.Stator of MGELR is obtained through photolithography,electroplate and sputtering deposition.The measuring result shows that the processing methods can get planar coil with high quality.Punch or evaporation can be used to fabricate microrotor,and for both methods,the punch can get microrotor with better quality.Preliminary experiment showed that this micromachining process scheme is feasible.

关 键 词：磁悬浮 转子 微陀螺 微细加工工艺 平面线圈 体硅腐蚀 

分 类 号：TN965[电子电信—信号与信息处理]