supported by the National Nature Science Foundation of China(No.51275230);NUAA Research Funding(No.kfjj20150507);Six Talent Peak of Jiangsu(No.ZBZZ-002);the Funding of Jiangsu Innovation Program for Graduate Education(No.KYLX_0227);the Fundamental Research Funds for the Central Universities
Micro-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition method.An innovative micro-diamond coated tool was used to the lap sapphire wafer.The effect of load,rotating speed,and lapp...