the National Natural Science Foundation of China(No.50472043);Program for New Century Excellent Talents in University(No.NCET-06-0658);the Scientific Research Foundation for the Returned Overseas Chinese Scholars(SRF for ROCS)of MOE,China(No.2003-406)
Iridium thin films have been deposited on Si3N4(100 nm)/Si(100) substrates by magnetron sputtering. And then iridium film micro-patterns were fabricated by ion milling technique. The atomic force microscopy (AFM...