supported by the Center for Advanced Materials Processing (CAMP) at Clarkson University;the National Integrate Circuit Research Program of China (Grant No. 2009ZX02023-3);the National Basic Research Program of China (GrantNos. 2007CB935400,2010CB934300 and 2006CB302700);the National High Technology Development Program of China (GrantNo. 2008AA031402);the Science and Technology Council of Shanghai,China (Grant Nos. 08DZ2200700,08JC1421700 and09QH1402600);the Chinese Academy of Sciences Visiting Professorship for Senior International Scientists
We report on the investigation of the origin of high oxide to nitride polishing selectivity of ceria-based slurry in the presence of picolinic acid. The oxide to nitride removal selectivity of the ceria slurry with pi...
A compact spice model of the phase change memory with the crystalline fraction as the switching by Verilog-A language is proposed and demonstrated. The model can simulate not only the resistance change by the differen...
Project supported by the National Integrated Circuit Research Program of China(No.2009ZX02030-001);the Science and Technology Council of Shanghai,China(Nos.08111100300,08111100303,0952nm00200);the Shanghai Rising Star Program of China (No.07QH14017);the National Basic Research Program of China(Nos.2007CB935400,2010CB934300,2006CB302700);the National High Technology Research and Development Program of China(No.2008AA031402)
The effect of the ammonium molybdate concentration on the material removal rate(MRR) and surface quality in the preliminary chemical mechanical polishing(CMP) of a rough glass substrate was investigated using a si...
A phase change memory (PCM) device, based on the Ge2Sb2Te5 (GST) material, is fabricated using the standard 0.18-μm CMOS technology. After serials of detailed experiments on the phase transition behaviors, we fin...
Project supported by the National Basic Research Program of China(No.2006CB302700);the National Natural Science Foundation of China(No.60876076);the National Key Scientific and Technological Project of China(No.2009ZX02023-5-3)
A new modified method based on the charge pumping technique is proposed and adopted to extract the lateral profiles of oxide charges in an advanced MOSFET. A 0.12 μm SONOS device with 50 nm threshold voltage peak is ...
Project supported by the National Basic Research Program of China(No.2006CB302700)
In order to overcome the bit-to-bit interference of the traditional multi-level NAND type device, this paper firstly proposes a novel multi-bit non-uniform channel charge trapping memory (NUC-CTM) device with virtua...
Simulation of the heat consumption in phase change random access memories (PCRAMs) is investigated by a three-dimensional finite element model. It is revealed that the thermal conductivity and electrical conductivit...
A three-dimensional finite element model for phase change random access memory is established to simulate electric, thermal and phase state distribution during (SET) operation. The model is applied to simulate the S...