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国家自然科学基金(61178022): 作品数：14被引量：44H指数：4; 导出分析报告; 相关作者：林景全窦银萍孙长凯宋晓林田勇更多>>; 相关机构：长春理工大学更多>>; 相关期刊：《Chinese Physics B》《Chinese Optics Letters》《光谱学与光谱分析》《中国激光》更多>>; 相关主题：PLASMA极紫外光刻激光等离子体FEMTOSECOND_LASERRESOLVED更多>>; 相关领域：理学电子电信机械工程化学工程更多>>

Gd靶激光等离子体光源离带辐射及其等离子体演化的研究被引量：1: 《光谱学与光谱分析》2016年第10期3114-3118,共5页宋晓林宋晓伟窦银萍田勇谢卓高勋林景全; 国家自然科学基金项目(61178022);长春市科技局项目(14KP007)资助; 利用脉冲宽度为10ns,输出波长为1 064nm的Nd∶YAG激光器作用金属Gd以及纳米粒子掺杂的低密度Gd玻璃等两种形式靶所产生等离子体光源的离带辐射进行了研究,发现等离子体所发出的连续辐射是离带辐射的主要成分,光谱分布与温度为5eV的普朗...; 关键词：极紫外光刻离带辐射电子温度和密度时空分辨光谱

Gd靶激光等离子体6.7nm光源的实验研究被引量：3: 《物理学报》2015年第23期204-211,共8页窦银萍谢卓宋晓林田勇林景全; 国家自然科学基金(批准号:61178022);长春市科技局项目(批准号:14KP007)资助的课题~~; 本文对Gd靶激光等离子体极紫外光源进行了实验研究,在6.7 nm附近获得了较强的辐射,并研究了6.7nm附近光辐射随打靶激光功率密度变化的规律以及收集角度对极紫外辐射的影响.同时,对平面Gd靶激光等离子光源的离子碎屑角分布进行了测量,发...; 关键词：极紫外光刻极紫外光源激光Gd等离子体光源碎屑

Spectral Enhancement of Laser-Induced Breakdown Spectroscopy in External Magnetic Field被引量：4: 《Plasma Science and Technology》2015年第11期919-922,共4页李丞高勋李奇宋超林景全; supported by National Natural Science Foundation of China(No.61178022);the Natural Science Foundation of Jilin Province,China(No.201215132);the Doctoral Program of High Education of China(No.20112216120006); In this paper the spectral enhancement of laser-induced breakdown spectroscopy （LIBS） for copper plasma in the presence of a magnetic field is investigated and the temporal- and spatial-resolved plasma emission spec...; 关键词：laser induced breakdown spectroscopy spectral enhancement magnetic confinement

The Effect of an External Magnetic Field on the Plume Expansion Dynamics of Laser-Induced Aluminum Plasma被引量：1: 《Plasma Science and Technology》2015年第8期693-698,共6页Atif HUSSAIN 李奇郝作强高勋林景全; supported by National Natural Science Foundation of China(No.61178022);the Research Foundation for Doctoral Program of Higher Education of China(Nos.20112216120006,20122216120009 and 20122216110007);the Project of 14KP007; In this work, we investigated the plasma morphology induced by a Nd：YAG laser with the aim of improving the understanding of the formation and dynamics of the plasma in two cases, with and without a magnetic field. S...; 关键词：plasma plume fast imaging magnetic confinement

One-step formation of multifunctional nano- and microscale structures on metal surface by femtosecond laser被引量：7: 《Chinese Optics Letters》2015年第6期48-51,共4页陶海岩宋晓伟郝作强林景全; supported by the National 973 Program of China(No.2013CB922404);the National Natural Science Foundation of China(Nos.11074027,61178022,and 11274053);the Funds from Science and Technology Department of Jilin Province(No.20111812),the Project 14KP007;the Research Fund for the Doctoral Program of Higher Education of China(Nos.20122216120009,20122216110007,and 20112216120006); Metals in nature exhibit a mediocre wettability and a high optical reflectance from the visible region to the infrared. This Letter reports that, by formation of nano- and microscale structures via a simple raster sca...; 关键词：Electromagnetic wave absorption HYDROPHOBICITY Laser pulses Light absorption REFLECTION Ultrafast lasers

Shadowgraph investigation of plasma shock wave evolution from Al target under 355-nm laser ablation被引量：5: 《Chinese Physics B》2014年第8期408-414,共7页刘天航郝作强高勋刘泽昊林景全; Project supported by the National Key Basic Research Program,China(Grant No.2013CB922404);the National Natural Science Foundation of China(Grant Nos.61178022,11074027,11274053,and 11211120156);the Funds from Science and Technology Department of Jilin Province,China(Grant Nos.20111812 and 20130522149JH);the Research Fund for the Doctoral Program of Higher Education of China(Grant Nos.20122216120009,20122216110007,and 20112216120006); The propagation of a plasma shock wave generated from an Al target surface ablated by a nanosecond Nd：YAG laser operating at 355 nm in air is investigated at the different focusing positions of the laser beam by usin...; 关键词：laser-induced plasma shock wave air ionization off-focus

Mitigation of energetic ion debris from Gd plasma using dual laser pulses and the combined effect with ambient gas: 《Chinese Physics B》2014年第7期505-509,共5页窦银萍孙长凯刘超智高健郝作强林景全; supported by the National Basic Research Program of China (Grant No. 2013CB922404);the National Natural Science Foundation of China (Grant Nos. 11074027,61178022,11274053,and 11211120156);the Science & Technology Department of Jilin Province,China (Grant No. 20111812);the Research Fund for the Doctoral Program of Higher Education of China (Grant Nos. 20122216120009,20122216110007,and 20112216120006);the Young Scientists Fund of Changchun University of Science and Technology,China (Grant No. 000520).; For the next-generation beyond extreme ultraviolet lithography （EUVL） sources, gadolinium （Gd） plasma with emis- sion wavelength at 6.7 nm seems to be the leading candidate. Similar to the Sn target 13.5 nm light ...; 关键词：extreme ultraviolet source laser-induced plasma Gd plasma ion debris

声学法判断金属铝板靶激光支持爆轰波的点燃阈值: 《中国激光》2013年第11期108-111,共4页刘天航高勋刘泽昊郝作强孙长凯林景全; 国家自然科学基金(61178022); 基于声学法对1064和355nm激光脉冲作用金属铝板的激光支持爆轰波（LSDW）点燃阈值进行了研究，理论分析了激光等离子体声波压强与冲击波的膨胀速度关系，歼展了1064nm和355nm激光作用铝板靶的实验研究。实验结果表明等离子体声波存在时...; 关键词：激光技术激光等离子体激光支持爆轰波声学诊断点燃阈值

The polarization characteristics of single shot nanosecond laser-induced breakdown spectroscopy of Al被引量：1: 《Chinese Physics B》2013年第4期281-285,共5页刘佳陶海岩高勋郝作强林景全; Project supported by the National Natural Science Foundation of China (Grant Nos. 60978014, 11074027, 61178022, 11274053, and 11211120156);the Fundsfrom Science and Technology Department of Jilin Province, China (Grant Nos. 20090523, 20100521, 20100168, and 20111812);Funds from Education Department of Jilin Province; The polarization-resolved laser-induced breakdown spectroscopy （PRLIBS） technique, which can significantly reduce the polarized emission from laser plasma by placing a polarizer in front of the detector, is a powerf...; 关键词：polarization-resolved laser-induced breakdown spectroscopy laser plasma S/N ratio

Comparative investigation of the resistance and ability to trigger high voltage discharge for single and multiple femtosecond filaments in air: 《Chinese Physics B》2013年第3期372-374,共3页郭凯敏郝作强林景全孙长凯高勋赵振明; Project supported by the National Natural Science Foundation of China (Grant Nos. 11074027,60978014,61178022,11274053,and 11211120156);the Funds from Sci. & Tech. Deparment of Jilin Province,China (Grant No. 20111812); A comparative investigation of the resistance and ability to trigger high voltage（HV） discharge for a single filament（SF） and multiple filaments（MFs） has been carried out.The experimental results show that the t...; 关键词：femtosecond filament RESISTANCE high voltage breakdown threshold

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