supported by the National Science and Technology Major Project of China (Grant No. 2016ZX02301001)
A physical model for simulating overlay metrology employing diffraction based overlay(DBO)principles is built.It can help to optimize the metrology wavelength selection in DBO.Simulation result of DBO metrology with a...
financially supported by the ERC Starting Grant No.715770(QD-NOMS);the National Natural Science Foundation of China(No.61728501)
Single photon sources are key components for quantum technologies such as quantum communication, computing and metrology. A key challenge towards the realization of global quantum networks are transmission losses in o...
To achieve high pumping efficiency and stability, a wavelength stabilized 980 nm broad area distributed feedback laser was realized. A nanoimprint lithography technique was used to fabricate the first-order gratings. ...
supported by the Natural Basic Research Program of China(No.2013CB632105);the National Natural Science Foundation of China(No.61177055)
The photocurrent effect in pin silicon waveguides at 1550 nm wavelength is experimentally investigated. The photocurrent is mainly attributed to surface-state absorption,defect-state absorption and/or two-photon absor...
Project supported by the National Natural Science Foundation of China(Nos.50802118,60906005);the Natural Science Foundation of Guangdong Province,China(No.9451027501002848)
Selected area laser-crystallized polycrystalline silicon (p-Si) thin films were prepared by the third harmonics (355 nm wavelength) generated by a solid-state pulsed Nd:YAG laser. Surface morphologies of 400 nm t...
Project supported by the National Natural Science Foundation of China(Nos.60776051,60376033);the Beijing Municipal Natural Science Foundation of China(No.4082007);the Beijing Municipal Education Committee of China(Nos.KM200910005001, KM200710005015).
A novel cascaded DFB laser,which consists of two serial gratings to provide selectable wavelengths,is presented and analyzed by the transfer matrix method.In this method,efficient facet reflectivity is derived from th...
supported by the National High Technology Research and Development Program of China (Nos. 2007AA03Z417, 2006AA01Z256,2007AA03Z419);the State Key Development Program for Basic Research of China (Nos. 2006CB604901, 2006CB604902);the National Natural Science Foundation of China (Nos. 90401025, 60736036, 60706009, 60777021).
A complex-coupled DFB laser with sampled grating has been designed and fabricated. The method uses the + 1 st order reflection of the sampled grating for laser single-mode operation. The typical threshold current of ...
We propose a fiber-to-waveguide coupler for side-illuminated p-i-n photodiodes to obtain high responsivity and low polarization dependence that is grown on InP substrate and is suitable for surface hybrid integration ...
A new technology for fabrication of silica on silicon arrayed waveguide grating (AWG) based on deep etching and thermal oxidation is presented.Using this method,a silicon layer is remained at the side of waveguide.The...
Experiment on quantum well intermixing (QWI) of InGaAsP QWs by impurity free vacancy diffusion (IFVD) using SiO 2 encapsulation is reported.A maximum band gap wavelength blue shift as large as 200nm is realized.Furt...