NANOPATTERN

作品数：10被引量：6H指数：2
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Influence of Film Thickness on Nanofabrication of Graphene Oxide
《Nanomanufacturing and Metrology》2024年第2期13-25,共13页Chuan Tang Lei Chen Linmao Qian 
supported by the National Natural Science Foundation of China(Nos.52350411,52122507 and 52235004);Sichuan Science and Technology Program(2023NSFSC1988 and 2023YFSY0004);the Fundamental Research Funds for the Central University(No.2682021ZTPY095).
Nanofabrication of two-dimensional materials through mechanical machining is normally influenced by not only process parameters such as load and velocity but also intrinsic properties such as strength and thickness.He...
关键词：Graphene oxide Nanofabrication Film thickness step edge NANOPATTERN Deoxidized treatment 
Patterning single-layer materials by electrical breakdown using atomic force microscopy
《Nanotechnology and Precision Engineering》2024年第1期71-77,共7页Yajie Yang Jiajia Lu Yanbo Xie Libing Duan 
supported by the National Natural Science Foundation of China(Grant Nos.12075191,12388101,and 12241201);the Fundamental Research Funds for the Central Universities(Grant No.D5000230120);the Natural Science Basic Research Program of Shaanxi Province(Grant No.2023-JC-YB-541).
The development of nanoelectronics and nanotechnologies has been boosted significantly by the emergence of 2D materials because of their atomic thickness and peculiar properties,and developing a universal,precise patte...
关键词：2D material NANOPATTERN AFM Electrical breakdown LITHOGRAPHY 
Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification
《Microsystems & Nanoengineering》2024年第1期335-344,共10页Berke Erbas Ana Conde-Rubio Xia Liu Joffrey Pernollet Zhenyu Wang Arnaud Bertsch Marcos Penedo Georg Fantner Mitali Banerjee Andras Kis Giovanni Boero Juergen Brugger 
funding from the European Research Council(ERC)under the European Union’s Horizon 2020 research and innovation program(Project MEMS4.0,ERC-2016-ADG,grant agreement No.742685);the EU’s H2020 framework program for research and innovation under grant agreement n.101007417,NFFA-Europe Pilot Project.M.B.acknowledges the support of SNSF Eccellenza grant No.PCEGP2_194528;support from the QuantERA II Programme that has received funding from the European Union’s Horizon 2020 research and innovation program under Grant Agreement No 101017733;G.F.and M.P.received funding through the European research council H2020-UE Framework Programme for Research&Innovation(2014-2020);ERC-2017-CoG;InCell;Project number 773091,and the Swiss National Science Foundation through grant 200021_182562.
Grayscale structured surfaces with nanometer-scale features are used in a growing number of applications in optics and fluidics.Thermal scanning probe lithography achieves a lateral resolution below 10 nm and a vertic...
关键词：LITHOGRAPHY THERMAL pattern 
Spatial modulation of nanopattern dimensions by combining interference lithography and grayscale-patterned secondary exposure被引量：3
《Light(Science & Applications)》2022年第5期832-841,共10页Zhuofei Gan Hongtao Feng Liyang Chen Siyi Min Chuwei Liang Menghong Xu Zijie Jiang Zhao Sun Chuying Sun Dehu Cui Wen-Di Li 
partially supported by the Research Grants Council of the Hong Kong Special Administrative Region(Awards no.17207419,17209320,C7018-20G,and AoE/P-701/20);the Platform Technology Funding program,and the Seed Funding Program for Basic Research(202011159235 and 202010160046);the University of Hong Kong,and Shenzhen Government(Grant no.K20799112).
Functional nanostructures are exploited for a variety of cutting-edge fields including plasmonics,metasurfaces,and biosensors,just to name a few.Some applications require nanostructures with uniform feature sizes whil...
关键词：LITHOGRAPHY DIMENSIONS spatially 
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