MICROMIRROR

作品数：19被引量：30H指数：4
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相关领域：机械工程更多>>
相关作者：尹冬青闫桂珍陈庆华陈章渊徐安士更多>>
相关机构：北京大学更多>>
相关期刊：《Control Theory and Technology》《Microsystems & Nanoengineering》《Journal of Mechanics Engineering and Automation》《Semiconductor Photonics and Technology》更多>>
相关基金：国家自然科学基金上海市浦江人才计划项目北京市自然科学基金国家教育部博士点基金更多>>
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Technologies and applications of silicon-based micro-optical electromechanical systems:A brief review被引量：5
《Journal of Semiconductors》2022年第8期24-32,共9页Shanshan Chen Yongyue Zhang Xiaorong Hong Jiafang Li 
supported by the National Natural Science Foundation of China under Grant No.61975016;the Science and Technology Project of Guangdong(2020B010190001);Natural Science Foundation of Beijing Municipality(1212013 and Z190006);Beijing Municipal Science&Technology Commission,Administrative Commission of Zhongguancun Science Park No.Z211100004821009;Cultivation Project for Basic Research and Innovation of Yanshan University No.2021LGQN021.
Micro-optical electromechanical systems(MOEMS)combine the merits of micro-electromechanical systems(MEMS)and micro-optics to enable unique optical functions for a wide range of advanced applications.Using simple exter...
关键词：MOEMS Si-based micromachining technology MICROMIRROR MICRO-SPECTROMETER optical switches 
A Into-Plane Rotating Micromirror Actuated by a Hybrid Electrostatic Driving Structure
《Journal of Semiconductors》2005年第9期1699-1704,共6页吴文刚 陈庆华 尹冬青 闫桂珍 陈章渊 郝一龙 徐安士 
国家自然科学基金(批准号:60278028);北京市国家技术创新计划(批准号:772167384624)资助项目
A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabr...
关键词：MICROMIRROR hybrid electrostatic driving structure planar plate drive vertical comb drive mixed sil icon micromachining 
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