DICHLOROSILANE

作品数：3被引量：1H指数：1
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相关领域：理学化学工程更多>>
相关期刊：《Advances in Chemical Engineering and Science》《Chinese Chemical Letters》更多>>
相关基金：国家自然科学基金更多>>
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Boron-Silicon Thin Film Formation Using a Slim Vertical Chemical Vapor Deposition Reactor
《Advances in Chemical Engineering and Science》2023年第1期7-18,共12页Yuki Kamochi Atsuhiro Motomiya Hitoshi Habuka Yuuki Ishida Shin-Ichi Ikeda Shiro Hara 
A boron-silicon film was formed from boron trichloride gas and dichlorosilane gas at about 900℃in ambient hydrogen at atmospheric pressure utilizing a slim vertical cold wall chemical vapor deposition reactor de...
关键词：Chemical Vapor Deposition Boron-Silicon Film Boron Trichloride DICHLOROSILANE 
Quartz Crystal Microbalances for Evaluating Gas Motion Differences between Dichlorosilane and Trichlorosilane in Ambient Hydrogen in a Slim Vertical Cold Wall Chemical Vapor Deposition Reactor被引量：1
《Advances in Chemical Engineering and Science》2020年第3期190-200,共11页Mana Otani Toshinori Takahashi Hitoshi Habuka Yuuki Ishida Shin-Ichi Ikeda Shiro Hara 
A dichlorosilane gas and a trichlorosilane gas in ambient hydrogen were evaluated to show their different gas flow motions in a slim vertical cold wall chemical vapor deposition reactor for the Minimal Fab system. Thi...
关键词：Minimal Fab Chemical Vapor Deposition Reactor Quartz Crystal Microbalance Silicon Epitaxial Growth TRICHLOROSILANE DICHLOROSILANE 
Synthesis of Methyl-(γ-chloropropyl)dichlorosilane Catalyzed by Silica-supported Karstedt-type Catalyst
《Chinese Chemical Letters》2006年第9期1155-1158,共4页Zheng Ping FANG Hai Tang YANG Qian Jiang MIAO Guo Ping CAI 
support from the National Natural Science Foundation of China(No.50473036)
Methyl-（γ-chloropropyl）dichlorosilane was synthesized under the catalysis of a silicasupported Karstedt-type catalyst. By orthogonal experimental design method, the optimum reaction parameters such as reactants rat...
关键词：Methyl-（γ-chloropropyl）dichlorosilane silica-supported Karstedt-type catalyst hydrosilylation synthesis. 
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