A dichlorosilane gas and a trichlorosilane gas in ambient hydrogen were evaluated to show their different gas flow motions in a slim vertical cold wall chemical vapor deposition reactor for the Minimal Fab system. Thi...
supported by the Major State Basic Research Program of China(No.2009CB623404);National Natural Science Foundation of China(Nos.20736003,20676067);National High Technology Research and Development Program of China(Nos.2007AA06Z317,2008EG111021);Foundation of Ministry of Education of China (No.20070003130);Foundation of the State Key Laboratory of Chemical Engineering(SKL-ChE-08A01)
Ultra-fine silicalite-1 particles were modified with four kinds of chlorosilanes (dodecyltrichlorosilane, octyltrichlorosilane, hexadecyltrichlorosilane and octadecyltrichlorosilane) and characterized by FI-IR, TGA,...
Montmorillonite was modified by chlorosilane derivatives (trimethylchlorosilane and tert butyldimethylchlorosilane) bas^ed on the reaction between OH group and chlorosilane. Fourier transformed infrared spec...