POLISHING

作品数：210被引量：349H指数：10
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相关作者：辛企明康仁科霍凤伟金洙吉赵福令更多>>
相关机构：大连理工大学东华大学北京理工大学南昌大学更多>>
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相关基金：国家自然科学基金国家重点基础研究发展计划广东省自然科学基金河北省自然科学基金更多>>
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  • 期刊=International Journal of Extreme Manufacturingx
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Towards atomic-scale smooth surface manufacturing of β-Ga_(2)O_(3)via highly efficient atmospheric plasma etching
《International Journal of Extreme Manufacturing》2025年第1期482-502,共21页Yongjie Zhang Yuxi Xiao Jianwen Liang Chun Zhang Hui Deng 
supported by the National Natural Science Foundation of China(52375437,52035009);the Natural Science Foundation of Guangdong Province(2024B1515020027);the Shenzhen Science and Technology Program(Grant No.KQTD20170810110250357)for the financial support;the assistance of SUSTech Core Research Facilities;supported by Shenzhen Engineering Research Center for Semiconductorspecific Equipment。
The highly efficient manufacturing of atomic-scale smooth β-Ga_(2)O_(3)surface is fairly challenging because β-Ga_(2)O_(3)is a typical difficult-to-machine material.In this study,a novel plasma dry etching method na...
关键词：atmospheric plasma plasma etching atomic-scale polishing gallium oxide next-generation semiconductor 
A novel approach of jet polishing for interior surface of small-grooved components using three developed setups
《International Journal of Extreme Manufacturing》2024年第2期428-447,共20页Qinming Gu Zhenyu Zhang Hongxiu Zhou Jiaxin Yu Dong Wang Junyuan Feng Chunjing Shi Jianjun Yang Junfeng Qi 
the National Key Research and Development Program of China(2018YFA0703400);the Young Scientists Fund of the National Natural Science Foundation of China(52205447);Changjiang Scholars Program of the Chinese Ministry of Education。
It is a challenge to polish the interior surface of an additively manufactured component with complex structures and groove sizes less than 1 mm.Traditional polishing methods are disabled to polish the component,meanw...
关键词：abrasive air jet polishing multi-phase jet polishing interior curved surface small-grooved component aluminum alloy 
Energy beam-based direct and assisted polishing techniques for diamond:A review
《International Journal of Extreme Manufacturing》2024年第1期93-124,共32页Zhuo Li Feng Jiang Zhengyi Jiang Zige Tian Tian Qiu Tao Zhang Qiuling Wen Xizhao Lu Jing Lu Hui Huang 
sponsored by the National Natural Science Foundation of China(Nos.51835004,U22A20198);the Major Science and Technology Projects in Henan Province(221100230300);the 111 Project(No.B23011)。
Diamond is a highly valuable material with diverse industrial applications,particularly in the fields of semiconductor,optics,and high-power electronics.However,its high hardness and chemical stability make it difficu...
关键词：single crystal diamond polycrystalline diamond energy beam polishing technology material removal mechanism influencing factors 
Polishing and planarization of single crystal diamonds: state-of-the-art and perspectives被引量：8
《International Journal of Extreme Manufacturing》2021年第2期45-87,共43页Hu Luo Khan Muhammad Ajmal Wang Liu Kazuya Yamamura Hui Deng 
financial support for this work from the Guangdong Basic and Applied Basic Research Foundation (2019A1515111133);the National Natural Science Foundation of China (Grant Nos. 52035009, 52005243);the research fund for International Cooperation (GJHZ20180928155412525) from the Science and Technology Innovation Committee of Shenzhen Municipality, Shenzhen, China。
Diamond is a promising material for the modern industry. It is widely used in different applications, such as cutting tools, optical windows, heat dissipation, and semiconductors.However, these application areas requi...
关键词：diamond polishing material removal anisotropy ultra-smooth surface chemical reaction surface quality 
Investigation of the trajectory uniformity in water dissolution ultraprecision continuous polishing of large-sized KDP crystal
《International Journal of Extreme Manufacturing》2020年第4期48-56,共9页Zhipeng Cheng Hang Gao Ziyuan Liu Dongming Guo 
funded by the National Natural Science Foundation of China(Grant No.51135002);Science Fund for Creative Research Groups of NSFC(Grant No.51621064)。
Large-sized potassium dihydrogen phosphate(KDP)crystals are an irreplaceable nonlinear optical component in an inertial confinement fusion project.Restricted by the size,previous studies have been aimed mainly at the ...
关键词：potassium dihydrogen phosphate crystal water dissolution ultraprecision continuous polishing trajectory uniformity FLATNESS 
Implications of using two low-power continuous-wave lasers for polishing被引量：4
《International Journal of Extreme Manufacturing》2020年第3期174-182,共9页Wenxuan Zhang Kiwan Wong Miguel Morales Carlos Molpeceres Craig B Arnold 
This study was supported by Princeton University Eric and Wendy Schmidt Transformative Technology Fund.This simulation was funded by Comunidad de Madrid Project ADITIMAT-CM(S2018/NMT-4411);Universidad Politecnicade Madrid Research Grant(EST-PDI-19-A1JMBI-26-T4MNY9).The authors also want to thank Luc Deike for valuable discussions.The authors acknowledge the use of Princeton's Imaging and Analysis Center,which is partially supported by the Princeton Center for Complex Materials,a National Science Foundation(NSF)MRSEC program(DMR-1420541),for the SEM image acquisition.
Laser polishing is widely employed to reduce the surface roughness of products with complex geometries.Traditional laser polishing techniques use a single high-power Gaussian beam to melt and smooth a thin layer of su...
关键词：laser polishing surface roughness dual lasers LOW-POWER 
Formation mechanism of a smooth, defectfree surface of fused silica optics using rapid CO2 laser polishing被引量：14
《International Journal of Extreme Manufacturing》2019年第3期85-95,共11页Linjie Zhao Jian Cheng Mingjun Chen Xiaodong Yuan Wei Liao Qi Liu Hao Yang Haijun Wang 
supported by the National Natural Science Foundation of China(Grant Nos.51775147,51705105);Science Challenge Project(Grant No.TZ2016006-0503-01);Young Elite Scientists Sponsorship Program by CAST(Grant No.2018QNRC001);China Postdoctoral Science Foundation funded project(Grant Nos.2018T110288,2017M621260);Self-Planned Task(Grant Nos.SKLRS201718A,SKLRS201803B)of State Key Laboratory of Robotics and System(HIT);Fundamental Research Funds for the Central Universities(Grant No.HIT.NSRIF.2019053).
Surface defects introduced by conventional mechanical processing methods can induce irreversible damage and reduce the service life of optics applied in high-power lasers.Compared to mechanical processing,laser polish...
关键词：laser polishing mechanical processing smooth surface defect-free surface polishing rate 
Manufacturing technologies toward extreme precision被引量：17
《International Journal of Extreme Manufacturing》2019年第2期11-32,共19页Zhiyu Zhang Jiwang Yan Tsunemoto Kuriyagawa 
Precision is one of the most important aspects of manufacturing.High precision creates high quality,high performance,exchangeability,reliability,and added value for industrial products.Over the past decades,remarkable...
关键词：ultraprecision cutting GRINDING POLISHING supersmooth surface ultraprecision measurement extreme precision 
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