supported by the National Natural Science Foundation of China(Nos.61027010 and 61376122);Jilin Province Science and Technology Development Plan(Nos.201205025 and 20130206010GX);Changchun Science and Technology Plan(No.11DJ03);State Key Laboratory of Applied Optics Own Funds
A type of spatial modulating micro Fourier transform spectrometer(FTS) based on micro multi-step mirrors(MMSMs) is designed and manufactured in this paper.The interference system is based on Michelson interferometer,u...