Project supported by the National Natural Science Foundation of China(No.51177134);the Natural Science Basic Research Plan in Shaanxi Province of China(No.2015JM6286)
β-FeSi2 thin films have been successfully prepared by magnetron sputtering and post rapid thermal annealing method on 6H-SiC (0001) substrates using a FeSi2 target and a Si target. X-ray diffraction (XRD) and Ram...
Project supported by the National Natural Science Foundation of China(No.51177134)
We give the first report on the experimental investigation of a p-β-FeSi2/n-4H-SiC heterojunction. A β-/%FeSiE/n-4H-SiC heterojunction near-infrared photodiode was fabricated on 4H-SiC substrate by magnetron sputter...