supported by the National Natural Science Foundation of China(NSFC,Grant Nos.61874111,62174152 and 62022079);the National Key Research and Development Program of China(Grant No.2020YFB1506400);the Youth Innovation Promotion Association of the Chinese Academy of Sciences(No.2020115);the Strategic Priority Research Program of the Chinese Academy of Sciences(XDA16021200).
Ionic gels can be potentially used in wearable devices owing to their high humidity resistance and non-volatility.However,the applicability of existing ionic gel pressure sensors is limited by their low sensitivity.Th...
supported by the National Natural Science Foundation of China(No.61471159);the Natural Science Foundation of Heilongjiang Province(No.F201433);the University Nursing Program for Young Scholars with Creative Talents in Heilongjiang Province(No.2015018);the Special Funds for Science and Technology Innovation Talents of Harbin in China(No.2016RAXXJ016)
Based on the asymmetric base region transistor, a pressure sensor with temperature compensation circuit is proposed in this paper. The pressure sensitive structure of the proposed sensor is constructed by a C-type sil...
Project supported by the National Natural Science Foundation of China(No.61275081)
According to the specific input-output characteristics of a pressure sensor, a novel calibration algorithm is presented and a calibration system is developed to correct the nonlinear error caused by temperature. In co...
Project supported by the National Natural Science Foundation of China(Nos.61025021,61434001);the ‘Thousands Talents’ Program for Pioneer Researchers and Its Innovation Team,China
This paper presents a micro packaged MEMS pressure sensor for intracranial pressure measurement which belongs to BioMEMS. It can be used in lumbar puncture surgery to measure intracranial pressure. Minia- turization i...
Project supported by the Key Program of the National Natural Science Foundation of China(No.61335008)
The silicon on insulator(SOI) high temperature pressure sensor is a novel pressure sensor with highperformance and high-quality. A structure of a SOI high-temperature pressure sensor is presented in this paper.The k...
Project supported by the National Basic Research Program of China(No.2010CB334703);the National Natural Science Foundation of China(No.51075375)
This paper presents a readout system for the passive pressure sensors which consist of a pressure- sensitive capacitor and an inductance coil to form an LC circuit. The LC circuit transforms the pressure variation int...
Project supported by the National High Technology Research and Development Program of China(No.2006AA04Z372).
This paper proposes a novel miniature dual-functional sensor integrating both pressure and temperature sensitive units on a single chip.The device wafer of SOI is used as a pizeoresistive diaphragm which features exce...