垂直式HVPE反应器温场的数值模拟  

Numerical Simulation of Vertical HVPE Reactor Temperature Field

作　　者：赵勇明[1] 陈贵锋[1] 陈雷英[1] 马晓薇[1] 白云娜[1] 李养贤[1] 

机构地区：[1]河北工业大学材料学院信息功能材料研究所,天津300130

出　　处：《半导体技术》2008年第S1期116-118,共3页Semiconductor Technology

基　　金：河北省科学技术研究与发展指导计划(07215134);河北省自然科学基金(E2008000079;E2007000119)

摘　　要：基于CFD理论得出了不同条件下的温场分布,研究了流速变化对HVPE反应器温场的影响。在模拟计算中,流场数值模拟基于非交错网格系统的SIMPLE算法,用有限体积方法对控制方程进行离散,并采用改进的压力-速度耦合方法进行求解温场通过与具体实验结合选择合适的温度传输模型,分别改变石墨环几何尺寸、流量等条件,得到反应器流场、温场的相应变化。根据对模拟结果进行分析,流场对温场的影响是重要的影响因素,流量的大小直接关系到温场的分布,并把数值模拟结果与实验进行了对比验证。The temperature field under different condition by CFD theory was presented.The effects of flow rate variation on temperature field were investigated in vertical HVPE reactor.The numerical code is based on the SIMPLE scheme with the non-stagger grids system.The improved pressure-velocity method by Rhine & Chow is adopted to avoid unreasonable pressure fluctuation.The governing equations are discredited with a finite volume method.The temperature field through experimentally choose rightly temperature transmit model.By varying the height of carbon annulus,inlet flow rates,the corresponding velocity,temperature and concentration fields inside the reactor are calculated.According to the results,flow field is the important factor of the temperature field,the size of the flow is directly related to the temperature distribution.The effects of these factor were studied through the comparison of numerical model predictions to experimentally observed.

关 键 词：氢化物气相外延 温场 计算机流体力学 有限体积法 流场 

分 类 号：TN304.055[电子电信—物理电子学]