压电直线驱动器  

A New Piezoelectric Linear Actuator

作　　者：左建勇[1] 颜国正[1] 高志军[1] 卢秋红[1] 

机构地区：[1]上海交通大学电子信息学院精密工程及智能微系统研究所,上海200030

出　　处：《压电与声光》2005年第3期232-234,239,共4页Piezoelectrics & Acoustooptics

基　　金：国家"八六三"高技术计划资助项目(2001AA422210)

摘　　要：采用电磁与压电相结合的方式给出了一种直线驱动器,详细介绍了该驱动器的结构与工作原理,并对其牵引力进行了估算与分析;比较了几种典型的驱动器控制信号波形,并选择一种较为合理的波形进行了驱动器性能试验,试验结果表明该驱动器能够可靠地实现双向运动,具有行程大,精度高,易于控制等特点,可用于微定位、微驱动等领域。A new linear actuator is introduced based on electromagnetism and piezoelectricity principle in this paper. The structure and locomotion mechanism of this actuator are described in detail, and the traction ability of it is analyzed. Three different kinds of control signal are compared deeply. Some actuating characteristic experiments have been done in this paper, and the experimental results show that this actuator can provide stable stepping movement, large displacement,high positioning accuracy, and can be used in micro electro mechanical systems.

关 键 词：直线驱动器 压电 工作原理 详细介绍 信号波形 性能试验 双向运动 试验结果 牵引力 微定位 微驱动 控制 

分 类 号：TP215[自动化与计算机技术—检测技术与自动化装置] TM38[自动化与计算机技术—控制科学与工程]