溶胶-凝胶法制作PZT微驱动器的研究  

Research of Microactuator with PZT Prepared by Sol-gel

作　　者：邱成军[1,2] 刘红梅[1] 张辉军[1] 赵全亮[1,2] 孟丽娜[1] 曹茂盛 

机构地区：[1]黑龙江大学集成电路重点实验室 [2]2北京理工大学材料科学与工程学院,北京100081 [3]北京理工大学材料科学与工程学院

出　　处：《材料工程》2007年第8期24-27,共4页Journal of Materials Engineering

基　　金：黑龙江省青年科学技术专项资金(QC05C12);黑龙江大学杰出青年基金(JC200504)

摘　　要：采用溶胶-凝胶法(Sol-gel)制备了PZT压电薄膜,利用PZT的压电效应制作以PZT薄膜为驱动的V型阀微驱动器。针对微驱动器的关键结构驱动膜,探索了Si/SiO2/Ti/Au/PZT/Cr/Au多层驱动膜结构制备方法,解决了在硅基底上制备PZT薄膜的问题,同时详细探讨了硅各向异性刻蚀微驱动器的关键部件驱动腔、单向阀的工艺,解决了集成制作的V型阀微驱动器的关键工艺问题,并通过SEM照片对V型阀和多层驱动膜进行了表征。研究结果表明,采用MEMS与IC技术结合的方法成功地完成了微驱动器的研制,得到的驱动腔硅杯平坦均匀。在V型阀微驱动器整体设计中需要的硅片数目少,降低了器件的复杂性,可以满足低功耗、小型化和批量生产的要求。The PZT piezoelectric thin film was deposited on silicon substrates by using sol-gel techniques. The PZT thin films was used to fabricate V type valve microactuator by its piezoelectric response. As the key structure of microactuator, the preparation of multi-layer driving membrane structure for the Si/SiO2/Ti/Pt/PZT/Cr/Au solved the questions of problem of PZT deposited on silicon substrate. The problems of fabrication for the pump cavity and one-way valve fabricated by anisotropic etching are investigated and solved. The SEM photographs of V type valve and XRD analysis for the multi-layer driving membrane are given. The results show that the method integrating MEMS and IC technology to fabricating the microactuator is successfully. The pump cavity is flat and uniform. In the design of V type valve, the number of silicon slice is less and so the complexity is reduced to satisfying the desires of low power, minimizing and large number production.

关 键 词：PZT薄膜 溶胶-凝胶法 各向异性刻蚀 微驱动器 MEMS 

分 类 号：TB43[一般工业技术]