微器件装配系统与关键技术  

The Assembly System and Key Technique of Micro Elements for Micro Mechanics

作　　者：李云平[1] 龙志峰[1] 李庆祥[1] 王晓晔[1] 薛实福[1] 

机构地区：[1]清华大学精密仪器与机械学系

出　　处：《光学精密工程》1997年第3期1-6,共6页Optics and Precision Engineering

摘　　要：微装配技术是实现组合结构的微机械电子学系统的关键技术之一。本文介绍了目前两种典型的可以实现不同功能的微器件装配系统以及设计微器件装配系统的关键技术。Micro assembly is one key techniques in realizing MEMS.In this paper,two micro assembly systems,one based on the SEM technique ,the other on the traditional optical microscope (TOM),are proposed,their features are analyzed and their construction and key design techniques are described.The micro assembly system that based on the SEM technique is found to have the quality of high resolution,large focus depth and the ability of nano score operation.One of the disadvantage is its high cost and complex operation.On the other hand,the system that based on the TOM is easy to operate and much economical.It is a valid technique for our project.

关 键 词：微系统 微装配 MEMS 微机械电子学 

分 类 号：TH－39[机械工程]