微悬臂梁传感器以及读出电路的单片集成  

Monolithic Integration of Micro-Cantilever and Readout Circuits

作　　者：汤雅权[1] 张海涛[1] 马盛林[1] 于晓梅[1] 

机构地区：[1]北京大学微电子学研究院,北京100871

出　　处：《传感技术学报》2008年第4期667-671,共5页Chinese Journal of Sensors and Actuators

基　　金：863资助项目(2006AA04Z336)

摘　　要：提出了一种基于SOI技术的微悬臂梁传感器集成化方案,并从传感器信号调理电路的设计和集成化工艺设计方面论证了该方案的可行性。微悬臂梁传感器集成化系统主要包括惠斯通电桥阵列以及微悬臂梁传感器的信号调理电路。信号调理电路部分包括温补电流源、时分多路选择器和两级仪用放大器。测量的结果证实了我们单片集成的可行性。This paper presents a novel way of monolithically integrated micro-cantilever with read-out circuits by using both SOI CMOS and the SOI micromachining technologies. Based on a thorough investigation and an analysis of the worldwide research achievements on micro-cantilevers monolithic integration, an integrated sensor system composed of a cantilever array, a digital controlled multiplexer, and an instrumentation amplifier are designed and processed, and intermediate-CMOS process was designed to fabricate the integrated system. The measurement results on the SOI CMOS circuitry of the integrated system prove the feasibility of the integration design.

关 键 词：单片集成 MEMS SOI 仪用放大器 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]