微波CVD金刚石热沉片的制备研究  

STUDY ON PREPARATION OF MICROWAVE CVD DIAMOND HEAT SPREADER

作　　者：熊礼威[1,2] 汪建华[1,2] 满卫东[2] 谢鹏[2] 孙蕾[2] 吴斌[2] 刘长林[2] 

机构地区：[1]中国科学院等离子体物理研究所,安徽合肥230031 [2]武汉工程大学,等离子体化学与新材料重点实验室,湖北武汉430074

出　　处：《真空与低温》2009年第1期9-13,共5页Vacuum and Cryogenics

基　　金：湖北省高等学校优秀中青年科技创新团队计划项目(2004419)资助。

摘　　要：采用化学气相沉积法(CVD)制备的金刚石薄膜具有接近于天然金刚石的导热性能,是目前最为理想的热沉材料。利用微波等离子体化学气相沉积法(MPCVD)制备了金刚石热沉片,并在此基础上研究了不同沉积工艺对金刚石热沉片散热性能的影响。采用扫描电子显微镜(SEM)和激光拉曼光谱(Raman)检测了薄膜的表面形貌及纯度,金刚石热沉片的导热性能则通过测量封装LED后薄膜的散热效果来进行表征。结果表明,在其他条件不变的情况下,提高生长过程中的微波输出功率、降低反应气压以及增加基片温度有利于制备出散热性能更佳的金刚石热沉片。The excellent thermal conductivity close to natural diamond sends Chemical Vapor Deposition （CVD）diamond film the most perfect material for heat spreader. Diamond film heat spreader was deposited by Microwave Plasma CVD（MPCVD） method, and the influences of different deposition conditions on the thermal conductivity of diamond heat spreaders were studied. Surface morphology and purity of the deposited diamond films were detected by SEM and Raman spectrum. The thermal conductivity of diamond heat spreaders were characterized by testing the temperature change of the LED cells encapsulated on it. The results showed that in other conditions remain unchanged, higher output of the microwave source, lower working pressure and higher substrate temperature were propitious to the growth of diamond films with better thermal conductivity.

关 键 词：微波等离子体 化学气相沉积 金刚石膜 热沉片 

分 类 号：TQ164[化学工程—高温制品工业]