铁电微型传感器和执行器制作技术  

Technology for ferroelectric microsensors and microactuators

作　　者：刘秦[1] 林殷茵[1] 张良莹[1] 姚熹[1] 

机构地区：[1]西安交通大学电子材料与器件研究所

出　　处：《电子元件与材料》1998年第5期1-2,5,共3页Electronic Components And Materials

摘　　要：采用表面微细加工技术制作了铁电微型传感器和执行器。其技术特点是将铁电薄膜制备和加工工艺与半导体集成电路工艺相结合。其技术难点有：平面化、多晶硅的内应力控制，悬空结构与基片粘连及各层薄膜制备工艺间的兼容性等。本文提出了解决方法。Microsensors and microactuators are manufactured by means of surface micromachining technology, a combination of the technology for ferroelectric film and the technology for semiconductor IC's The solutions to the problems lie in the difficult processes such as flattening, control of innerstress of multicrystal silicon, adhesion between suspended structure and substrate, compatibility between different processes, etc are discussed (10 refs )

关 键 词：铁电薄膜 传感器 执行器 MEMS 

分 类 号：TM221[一般工业技术—材料科学与工程] TP212[电气工程—电工理论与新技术]