石英微机械陀螺抗高冲击能力的优化研究  

Optimization Research on Anti High Shock Ability of Quartz MEMS Gyroscope

作　　者：林日乐[1] 李文蕴[1] 赵建华[1] 周倩[1] 满欣[1] 谢佳维[1] 

机构地区：[1]中国电子科技集团公司第26研究所,重庆400060

出　　处：《压电与声光》2013年第1期56-58,共3页Piezoelectrics & Acoustooptics

摘　　要：石英微机械陀螺敏感芯片通常为一体式音叉结构,为实现特定的功能,常在芯片中设计开槽结构,开槽拐角处是应力集中的部位。在高冲击情况下,该部位的最大应力可能先达到石英晶体的屈服强度,导致芯片结构断裂损坏。通过在敏感芯片的开槽结构末端设计圆弧台阶结构,降低了该部位在高冲击环境下受到的最大应力,提高了敏感芯片的抗冲击性能。通过综合优化后,石英微机械陀螺的抗高冲击能力可达到10 000g,并保持了较好的性能。The sensing elements of quartz MEMS gyroscope generally use a onepiece tuning fork structure. A notch structure is designed on the sensing elements for specific function,but at the corner of notch structure is a po sition which represents stress concentration. In high shock instance, stress concentration position first reaches the quartz yield strength, and brings on the sensing elements structure rupture. The maximal stress of structure is re duced by designing circular arc step structure at the corner of notch structure. Consequently, the anti high shock ability of sensing elements has been improved. Through comprehensive optimization, the anti high shock ability of quartz MEMS gyroscope exceeds 10 000g and quartz MEMS gyroscope keeps well performance.

关 键 词：石英 微机械 陀螺 抗高冲击 优化 

分 类 号：TN249[电子电信—物理电子学] V249[航空宇航科学与技术—飞行器设计]