微型光纤磁传感器的设计与制作  

Design and fabrication of micro fiber-optic magnetic sensor

作　　者：龙亮[1,2] 钟少龙[1] 徐静[1] 吴亚明[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室微系统技术重点实验室,上海200050 [2]中国科学院大学微系统与信息技术学院,上海200050

出　　处：《光学精密工程》2013年第9期2294-2302,共9页Optics and Precision Engineering

基　　金：国家重大科学仪器设备开发专项资金资助项目(No.2012YQ250002)

摘　　要：提出了一种基于微机电系统(MEMS)扭镜结构的光纤磁场传感器,并利用对角度变化非常敏感的双光纤准直器对扭镜的扭转角度进行了检测。该MEMS光纤磁传感器由MEMS扭镜结构、磁性敏感薄膜和双光纤准直器组成。文中分析了器件的磁敏感原理和光纤检测原理,介绍了器件综合设计方法,并给出了器件的结构参数。利用MEMS加工技术成功制作出了MEMS光纤磁传感器样品,最终得到的磁传感器的尺寸为3.7 mm×2.7 mm×0.5 mm。对磁传感器进行了实验测试,得到的输出实验值与理论值吻合。测试结果表明,该磁传感器的光纤检测灵敏度可达到0.65 dB/mT,最小可分辨磁场可达167 nT。将MEMS敏感结构与光纤检测相结合,该传感器兼备了两者的优点,结构紧凑、制作工艺简单、工作时无需电流激励。A Micro-electro-mechanical System（MEMS） fiber-optic magnetic sensor based on a MEMS torsional mirror was proposed and a dual-fiber collimator was used for measuring the tiny angle of tor- sional mirror. The MEMS fiber-optic magnetic senor is consists of a MEMS torsional mirror, a mag- netic film and a dual fiber collimator. The mechanisms of magnetic sensing and optical detection of the device were described, and the design and optimization of the device were discussed. A prototype for the MEMS magnetic sensor with a volume of 3.7 mm × 2.7 mm × 0.5 mm was fabricated successfully by MEMS technologies. The measured output values of the magnetic sensor are consistent with theo- retical values. Experimental results indicate that the sensitivity of the magnetic sensor is 0. 65 dig/mT. and its minimum resolution magnetic field is 167 nT. The MEMS fiber-optic magnetic sensor combines fiber-optic measurement and compact MEMS structure, and it has advantages of compact construct and simple fabrication processes. Moreover, it can operate without current excitation.

关 键 词：光纤传感器 磁传感器 微机电系统 光纤检测 磁性薄膜 

分 类 号：TN253[电子电信—物理电子学] TM936.1[电气工程—电力电子与电力传动]