基于光纤检测技术的扭转敏感微机电系统加速度传感器  

Torsion-Sensitive Micro-Electro Mechanical Systems Accelerometer Sensor Based on Optical Fiber Detection Technology

作　　者：钟少龙[1] 龙亮[1,2] 李明 吴亚明[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室,微系统技术重点实验室,上海200050 [2]中国科学院大学,北京100049 [3]中船重工远舟(北京)科技有限公司,北京100861

出　　处：《中国激光》2014年第3期102-109,共8页Chinese Journal of Lasers

基　　金：国家重大科学仪器设备开发专项(2012YQ250002)

摘　　要：为实现微型化、抗电磁干扰、可长时间工作和可远距离传输的加速度传感器,提出了一种基于微机电系统(MEMS)非对称扭镜结构的光纤加速度计设计方案,并利用对角度变化非常敏感的双光纤准直器对扭镜的扭转角度变化进行检测。MEMS光纤加速度计由MEMS非对称扭镜结构、驱动电极和双光纤准直器等组成。分析了器件的加速度敏感原理和光纤检测原理,介绍了器件综合设计考虑,并给出了器件的结构参数。利用MEMS加工技术成功制作了MEMS光纤加速度计样品。对加速度计进行了实验测试,加速度计的输出实验值与理论值吻合。测试结果表明,该加速度计量程为±2g,带宽为600 Hz,分辨率优于10-4 g,且具有良好的线性度和重复性。该MEMS光纤加速度计将MEMS敏感结构与光纤检测相结合,兼备了两者的优点,结构紧凑、制作工艺简单。In order to realize an accelerometer sensor with high performance, miniaturization anti-electromagnetic interference, long-work hours and long-distance transmission, a novel micro-electro mechanical system （MEMS） fiber-optic accelerometer based on asymmetric torsional mirror is proposed. A dual fiber collimator is used to measure the change of tiny angle of torsional mirror. The MEMS fiber-optic accelerometer consists of asymmetric torsional mirror, drive electrode and dual fiber collimator. The operation principle of the accelerometer and optical detection of the device are analyzed. Basic design and analytical optimization of the device are discussed. The MEMS fiber-optic accelerometer is fabricated successfully by MEMS processes. Measured results of the accelerometer are consistent with the theoretical values. Experimental results indicate that the dynamic range of the accelerometer is ±2g, the bandwidth is 600 Hz and the resolution is smaller than 10 49. Besides, the accelerometer has good linearity and repeatability. The MEMS fiber-optic accelerometer takes the advantages of fiber-optic measurement, including compact MEMS structure and simple fabrication processes.

关 键 词：传感器 微机电系统 加速度计 光纤传感器 光纤检测 微加工 

分 类 号：TM930.12[电气工程—电力电子与电力传动] O435.1[机械工程—光学工程]