微机电光开关  

Micro-electro-mechanical optical switches

作　　者：贾玉斌[1] 陈良惠[1] 李玉璋[1] 叶晓军[1] 康香宁[1] 

机构地区：[1]中国科学院半导体研究所国家光电子器件工程研究中心,北京100083

出　　处：《光学技术》2002年第1期85-88,共4页Optical Technique

摘　　要：对微机械光开关的特点和应用作了简要的论述 ,并对近年国外几种典型微机械光开关的结构、原理和研制方法作了简要的介绍和评述。这类新型的开关器件的主要优点是串话小 ,插入损耗小 ,消光比高 ,对波长和偏振不敏感 ,且体积小 ,造价低等 。The characters and applications of the micro electro mechanical optical switches are discussed concisely And a several typical structures, principles and development methods of these switches at abroad are introduced and reviewed for recent years These novel devices have many unique advantages such as low crosstalk and insertion loss, high extinction, independent of the wave lengths and polarization states of the optical signals, compact, inexpensive and etc, which show a wide applied promise in the fiber net work and its measure system

关 键 词：微光机电系统 微机械光开关 微反射镜 

分 类 号：TM564[电气工程—电器] TH-39[机械工程]