100 kHz重复频率锡液滴靶研究  

Study on 100 kHz Repetitive Frequency Tin Droplet Targets

作　　者：孙海轶[1] 王关德[1] 李学红 彭凯伦 邹家杰 彭宇杰 王成[1] 冷雨欣[1] 徐静浩[2] 范李立[2] 袁丰华[2] 李中梁[2] 步扬[2] 王天泽 张子怡 新刚 林楠 Sun Haiyi;Wang Guande;Li Xuehong;Peng Kailun;Zou Jiajie;Peng Yujie;Wang Cheng;Leng Yuxin;Xu Jinghao;Fan Lili;Yuan Fenghua;Li Zhongliang;Bu Yang;Wang Tianze;Zhang Ziyi;Xin Gang;Lin Nan(Key Laboratory of Ultra-intense laser Science and Technology,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;Laboratory of Information Optics and Optoelectronic Technology,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;University of Chinese Academy of Sciences,Beijing 100049,China;Department of Precision Optics Engineering,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China)

机构地区：[1]中国科学院上海光学精密机械研究所超强激光科学与技术重点实验室,上海201800 [2]中国科学院上海光学精密机械研究所信息光学与光电技术实验室,上海201800 [3]中国科学院大学,北京100049 [4]中国科学院上海光学精密机械研究所精密光学工程部(筹),上海201800

出　　处：《激光与光电子学进展》2023年第23期178-183,共6页Laser & Optoelectronics Progress

基　　金：国家科技部02专项(2018ZX02102-001);上海市科委项目(18DZ11125000,22S01807)。

摘　　要：锡液滴发生器是激光等离子体型极紫外(LPP-EUV)光刻光源中最重要的核心部件之一。光刻光源要求锡液滴靶具备高重复频率、小直径且稳定性好的特性。综述了中国科学院上海光学精密机械研究所EUV光源团队近年来在液滴发生器方面的研究进展,包括液滴直径、重复频率、间距、位置和稳定性等。现阶段研制的锡液滴发生器,在100 kHz频率下喷射的锡液滴直径约为40μm,间距约为230μm,工作时长接近5 h。锡液滴在10 s短时间内,竖直和水平方向的位置不稳定性分别约为2μm和1μm。未来锡液滴的可用性性能(如液滴直径、工作时长和长时间的位置稳定性)还需进一步提升。Tin droplet generator is a crucial submodules of the light source used in laser-pulsed plasma extreme ultraviolet lithography.Such a light source requires a tin droplet target with high repetition rate,small diameter,and good stability.This study presents our recent progress on the droplet generator,encompassing the droplet diameter,repetition rate,spacing between adjacent droplets,and position stability.The generated tin droplets exhibit a diameter of~40μm,spacing of 230μm between the adjacent droplets,and stable operating time of 5 h at a repetition rate of 100 kHz.Within a 10 s interval,the calculated standard deviation of the droplet positions in the vertical and horizontal directions are approximately 2μm and 1μm,respectively.However,the aspects of droplet usability,such as the droplet diameter,operating time,and long-term position stability require further improvement.

关 键 词：极紫外 光刻光源 液滴发生器 锡液滴 

分 类 号：TN249[电子电信—物理电子学]