一种用于MEMS检测的无耦合六维力传感器的研制  

Six-axis force/torque sensor for micro-testing system for MEMS

作　　者：贺德建[1] 张鸿海[1] 刘胜[1] 汪学方[1] 王志勇[1] 

机构地区：[1]华中科技大学微系统研究中心,湖北武汉430074

出　　处：《微纳电子技术》2003年第7期503-505,511,共4页Micronanoelectronic Technology

基　　金：国家 8 63高技术发展研究计划资助项目 (2 0 0 2AA40 44 3 0 )

摘　　要：提出了一种用于MEMS检测试验平台中力学量测量的无耦合六维力 /力矩传感器的设计。对传感器的结构形式、测量原理作了介绍 ,进行了试验验证并给出了从 8路输出电压到六维力 /力矩的传递矩阵。该传感器通过采用巧妙的结构形式和特定的电阻应变片布片方案实现了六维力解耦 ,大大简化了后置信号处理电路的设计且在各轴都具有较好的测量分辨率。实验证明 ,该传感器具有无耦合、测量分辨率高、线性度好、标定简单、贴片方便、制造成本低的优点 。A new type of six axis force sensor which can be used in MEMS measurement platform has been designed and its performances has been verified. Major features of it are high level of intrinsic decoupling of the signals from the strain gauges which greatly simplified the design of the signal processing system and reduced cost, high resolutions in all six axis, high linearity and repeatability, structural symmetry, low cost, simple procedure of calibration and easy reproduction. The measurement principle of the sensor is described and the experimental results and transfer matrix are given.

关 键 词：MEMS检测 六维力传感器 传递矩阵 微机电系统 工作原理 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]