supported by National Natural Science Foundation of China (Grant No. 50775201);National Science & Technology Major Project of China (Grant No. 2009ZX04014-031);PhD Programs Foundation of Ministry of Education of China (Grant No. 200803350031)
Numerical solutions could not perform rapid system-level simulation of the behavior of micro-electro-mechanical systems(MEMS) and analytic solutions for the describing partial differential equations are only availab...