supported by the National Natural Science Foundation of China (Grant No. 90923037)
A single-mask dry-release process for fabrication of high aspect ratio SOI MEMS devices is presented,which takes advantage of the lag effect in silicon DRIE(deep reactive ion etching).The wide trenches and the releasi...
supported by the National Natural Science Foundation of China(60525412,61077002 and 90923037)
In nature,rice leaves exhibit special anisotropic sliding capabilities.Although researchers have succeeded in fabricating artificial rice leaf structures and realizing the wettability function of the leaf surface,thes...
supported by the National Natural Science Foundation of China (90923037,61106068 and 61176045)
To obtain high-power semiconductor lasers with stable operation in a single longitudinal mode and improve the characteristics of the output beam,an end-emitting surface second-order metal grating distributed feedback(...
supported by the National Natural Science Foundation of China(11074247,60876036,61106047,61176045,61106068,51172225,61006054);Major program of National Natural Science Foundation of China(90923037)~~