supported by the State Key Development Program for Basic Research of China(No.2013CB328803);the National Natural Science Foundation of China(No.61136004)
The effect of active layer deposition temperature on the electrical performance of amorphous InGaZnO (a-IGZO) thin film transistors (TFTs) is investigated. With increasing annealing temperature, TFT performance is...
supported by the State Key Development Program for Basic Research of China(No.2013CB328803);the National Natural Science Foundation of China(No.61136004)
The influence of radio frequency(RF) power on the properties of magnetron sputtered amorphous indium gallium zinc oxide(a-IGZO) thin films and the related thin-film transistor(TFT) devices is investigated compre...