SUB-WAVELENGTH

作品数：40被引量：36H指数：3
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相关领域：电子电信机械工程理学更多>>
相关作者：严晓浪黄康王国雄更多>>
相关机构：浙江大学上海交通大学更多>>
相关期刊：《Journal of Semiconductors》《Frontiers of Optoelectronics》《Light(Science & Applications)》《Optoelectronics Letters》更多>>
相关基金：国家自然科学基金国家重点基础研究发展计划北京市自然科学基金国家教育部博士点基金更多>>
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Quasi-visualizable detection of deep sub-wavelength defects in patterned wafers by breaking the optical form birefringence
《International Journal of Extreme Manufacturing》2025年第1期623-639,共17页Jiamin Liu Jinlong Zhu Zhe Yu Xianrui Feng Zedi Li Lei Zhong Jinsong Zhang Honggang Gu Xiuguo Chen Hao Jiang Shiyuan Liu 
funded by National Natural Science Foundation of China(Grant Nos.52130504,52305577,and 52175509);the Key Research and Development Plan of Hubei Province(Grant No.2022BAA013);the Major Program(JD)of Hubei Province(Grant No.2023BAA008-2);the Interdisciplinary Research Program of Huazhong University of Science and Technology(2023JCYJ047);the Innovation Project of Optics Valley Laboratory(Grant No.OVL2023PY003);the Postdoctoral Fellowship Program(Grade B)of China Postdoctoral Science Foundation(Grant No.GZB20230244);the fellowship from the China Postdoctoral Science Foundation(2024M750995)。
In integrated circuit(IC)manufacturing,fast,nondestructive,and precise detection of defects in patterned wafers,realized by bright-field microscopy,is one of the critical factors for ensuring the final performance and...
关键词：defect inspection form birefringence breaking high order difference anisotropic illumination modes deep-subwavelength sensitivity defect classification 
High Q and sub-wavelength THz electric field confinement in ultrastrongly coupled THz resonators
《Photonics Research》2023年第7期1203-1216,共14页SIMON MESSELOT SOLEN COEYMANS JEROME TIGNON SUKHDEEP DHILLON JULIETTE MANGENEY 
Agence Nationale de la Recherche (ANR-19-CE24-0015,ANR-22-CE09-0018);European Research Council (820133)。
The control of light–matter coupling at the single electron level is currently a subject of growing interest for the development of novel quantum devices and for studies and applications of quantum electrodynamics.In...
关键词：COUPLING CAVITY coupled 
A Plasmonic Refractive-Index Sensor Based Multiple Fano Resonance Multiplexing in Slot-Cavity Resonant System
《Photonic Sensors》2022年第2期175-184,共10页Zicong GUO Kunhua WEN Yuwen QIN Yihong FANG Zhengfeng LI Li CHEN 
In this paper,a sub-wavelength metal-insulator-metal(MIM)waveguide structure is proposed by using a cross-shape rectangular cavity,of which wings are coupled with two rectangular cavities.Firstly,a cross-shape rectang...
关键词：SUB-WAVELENGTH MIM waveguide Fano resonance 
Mid-infrared quasi-BIC resonances with sub-wavelength slot mode profiles in germanium-based coupled guided-mode resonance structures
《Photonics Research》2022年第1期68-75,共8页A.S.LAL KRISHNA SRUTI MENON ASISH PROSAD VARUN RAGHUNATHAN 
Ministry of Electronics and Information Technology (Center of Excellence in Quantum Technologies,NNetra);Department of Science and Technology;Ministry of Science and Technology;India (Nano Mission, QUST Programme)。
We experimentally demonstrate a novel quasi-bound state in the continuum(BIC) resonance in the mid-infrared wavelength region with the resonant electric field confined as a slot mode within a low-refractive-index medi...
关键词：MODE resonance resonant 
Topology optimization method of metamaterials design for efficient enhanced transmission through arbitrary-shaped sub-wavelength aperture
《Chinese Physics B》2021年第9期558-564,共7页Pengfei Shi Yangyang Cao Hongge Zhao Renjing Gao Shutian Liu 
Project supported by the National Natural Science Foundation of China(Grant No.U1808215);the Natural Science Foundation of Liaoning Province,China(Grant No.20180540082);the Science and Technology Program of Shenzhen(Grant No.JSGG 20200102155001779).
The electromagnetic wave enhanced transmission(ET)through the sub-wavelength aperture was an unconventional physical phenomenon with great application potential.It was important to find a general design method which c...
关键词：METAMATERIAL enhanced transmission topology optimization arbitrary-shaped aperture 
Resolving Deep Sub-Wavelength Scattering of Nanoscale Sidewalls Using Parametric Microscopy
《Journal of Electronic Science and Technology》2021年第3期233-242,共10页Nagendra Parasad Yadav Ji-Chuan Xiong Wei-Ping Liu Wei-Ze Wang Yun Cao Ashish Kumar Xue-Feng Liu 
the National Major Scientific Instruments and Equipment Development Project under Grant No.61827814;the National Natural Science Foundation of China(NSFC)under Grant No.61501239;the NSFC International Young Scientist Research Fund under Grant No.61750110520;the Hubei Polytechnic University Laboratory Fund under Grant No.19XJK24R;the Jiangsu Postdoc Research Fund under Grant No.1601001B;the Beijing Natural Science Foundation under Grant No.Z190018;the Fundamental Research Funds for the Central Universities under Grant No.30920010011;the UK Engineering and Physical Sciences Research Council under Grant No.EP/R042578/1。
The quantitative optical measurement of deep sub-wavelength features with sub-nanometer sensitivity addresses the measurement challenge in the semiconductor fabrication process.Optical scatterings from the sidewalls o...
关键词：Light scattering nanoscale microscopy polarization SEMICONDUCTOR 
Experimental investigation of sound absorption in a composite absorber
《Theoretical & Applied Mechanics Letters》2021年第1期58-62,共5页Nansha Gao Hong Hou 
by Aeronautical Science Foundation of China(Grant 20181553015);Foundation of Shaanxi Educational Committee(Grant 2018BSHYDZZ03);the National Natural Science Foundation of China(Grant 11704314);China Postdoctoral Sci-ence Foundation(Grant 2018M631194).
A composite absorber made of a polyurethane sponge and multi-layer micro-perforated plates is pre-sented in this study.Results from an acoustic impedance tube test show that the polyurethane sponge can exhibits higher...
关键词：Composite absorber Multi-layer micro-perforated plate Porous material Sub-wavelength sound absorption 
PMMA-Based Microsphere Mask for Sub-wavelength Photolithography被引量：1
《Nanomanufacturing and Metrology》2020年第3期199-204,共6页Wenhe Feng Yin Chi Wan Xincai Wang 
a core-funded project(No.C16-M-034)of SIMTech,A*STAR Research Entities.
The authors present a polymethyl methacrylate(PMMA)-based,reusable microsphere mask used in the laser sub-wavelength photolithography.In order to overcome the diffraction limit to achieve nano-structuring using l-|im ...
关键词：Ultrafast laser Microspheres Mie-scattering PHOTOLITHOGRAPHY MASK Micro/nano-fabrication process 
Polarization control and tuning efficiency of tunable vertical-cavity surface-emitting laser with internal-cavity sub-wavelength grating被引量：1
《Chinese Physics B》2020年第8期310-316,共7页Xiao-Long Wang Yong-Gang Zou Zhi-Fang He Guo-Jun Liu Xiao-Hui Ma 
the Jilin Science and Technology Development Plan,China(Grant Nos.20180519018JH and 20190302052GX);Jilin Education Department“135”Science and Technology,China(Grant No.JJKH20190543KJ);the National Natural Science Foundation of China(Grant No.11474038);the Key Project of Equipment Pre-Research Fund of China(Grant No.61404140103)。
We design an 850 nm tunable vertical-cavity surface-emitting laser(VCSEL)structure using an internal-cavity sub-wavelength grating.The use of such a tuning structure allows for wider wavelength tuning range and more s...
关键词：sub-wavelength grating polarization mode tunable VCSEL wavelength tuning 
Advancements in high refractive index media:from quantum coherence in atomic systems to deep subwavelength coupling in metamaterials[Invited]被引量：2
《Chinese Optics Letters》2020年第6期60-66,共7页Leena Singh Weili Zhang 
Refractive index enhancement is crucial in the fields of lithography,imaging,optical communications,solar devices,and many more.We present a review of advancements in the process of designing high refractive index met...
关键词：high refractive index METAMATERIALS review sub-wavelength coupling quantum coherence TERAHERTZ 
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