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Thermal noise-driven resonant sensors: 《Microsystems & Nanoengineering》2024年第3期259-271,共13页Yan Qiao Alaaeldin Elhady Mohamed Arabi Eihab Abdel-Rahman Wenming Zhang; support of the National Natural Science Foundation of China(12032015,12202263);the Science and Technology Innovation Plan of Shanghai(21190760100);the Innovation Program of Shanghai Municipal Education Commission(2019-01-07-00-02-E00030);the China Postdoctoral Science Foundation(2021TQ0201,2022M712069).; MEMS/NEMS resonant sensors hold promise for minute mass and force sensing.However,one major challenge is that conventional externally driven sensors inevitably encounter undesired intrinsic noise,which imposes a funda...; 关键词：noise RESONANT OVERCOME

A resonant high-pressure microsensor based on a composite pressure-sensitive mechanism of diaphragm bending and volume compression: 《Microsystems & Nanoengineering》2024年第2期57-66,共10页Pan Qian Zongze Yu Jie Yu Yulan Lu Bo Xie Jian Chen Deyong Chen Junbo Wang; supported in part by the National Key R&D Program of China under Grant 2022YFB3207300;in part by the National Science Fund for Distinguished Young Scholars under Grant 61825107;in part by the National Natural Science Foundation of China under Grant 62301536;Grant 62121003,Grant 62201549,and Grant U1930206;in part by the Youth Innovation Promotion Association CAS under Grant 2023134 and Grant 2022121;in part by the Instrument Research and Development of CAS under Grant GJJSTD20210004.; In this paper,a composite pressure-sensitive mechanism combining diaphragm bending and volume compression was developed for resonant pressure microsensors to achieve high-pressure measurements with excellent accuracy....; 关键词：stability RESONANT BENDING

Fabrication of Mie-resonant silicon nanoparticles using laser annealing for surface-enhanced fluorescence spectroscopy: 《Microsystems & Nanoengineering》2024年第2期133-141,共9页Tatsuya Fukuta Ryo Kato Takuo Tanaka Taka-aki Yano; supported in part by JST FOREST grant No.JPMJFR202I(T.Y.)and JST CREST grant No.JPMJCR1904(T.T.)from the Japan Science and Technology Agency,JST;Tateishi Science and Technology Foundation(R.K.).; Silicon nanostructures with unique Mie resonances have garnered considerable attention in the field of nanophotonics.Here,we present a simple and efficient method for the fabrication of silicon(Si)nanoparticle substra...; 关键词：NANOPARTICLES ANNEALING RESONANT

Exceptional points enhance sensing in silicon micromechanical resonators被引量：1: 《Microsystems & Nanoengineering》2024年第1期17-25,共9页Man-Na Zhang Lei Dong Li-Feng Wang Qing-An Huang; supported by the National Key R&D Program of China(Grant No.2022YFB3203600);the National Natural Science Foundation of China(Grant Nos.62074032,62274030,61801110,and 61136006).; Exceptional points(EPs)have recently emerged as a new method for engineering the response of open physical systems,that is,systems that interact with the environment.The systems at the EPs exhibit a strong response to...; 关键词：RESONANT SYMMETRIC POINTS

A tip-coupled, two-cantilever, non-resonant microsystem for direct measurement of liquid viscosity: 《Microsystems & Nanoengineering》2023年第2期23-31,共9页Sudhanshu Tiwari Ajay Dangi Rudra Pratap; The work was partially supported by the Core Research Grant of the Science and Engineering Research Board,India.; We report a non-resonant piezoelectric microelectromechanical cantilever system for the measurement of liquid viscosity.The system consists of two PiezoMEMS cantilevers in-line,with their free ends facing each other.T...; 关键词：CANTILEVER VISCOSITY RESONANT

Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength: 《Microsystems & Nanoengineering》2023年第2期219-226,共8页Masaaki Oshita Shiro Saito Tetsuo Kan; supported by IMRA JAPAN CO.,LTD.;partly funded by JSPS KAKENHI Grant Number JP21J13187;the New Energy and Industrial Technology Development Organization(NEDO),Japan.; Plasmonic photodetectors have received increasing attention because their detection properties can be designed by tailoring their metal structures on surfaces without using any additional components.Reconfiguration of...; 关键词：tuning RECONFIGURABLE RESONANT

Acoustofluidic localization of sparse particles on a piezoelectric resonant sensor for nanogram-scale mass measurements: 《Microsystems & Nanoengineering》2021年第4期117-125,共9页Jingui Qian Habiba Begum Joshua E.-Y.Lee; supported by grants from the Research Grants Council of Hong Kong under project number CityU 11218118.; The ability to weigh microsubstances present in low concentrations is an important tool for environmental monitoring and chemical analysis.For instance,developing a rapid analysis platform that identifies the material...; 关键词：RESONANT SPARSE MASS

Bubble entrapment during the recoil of an impacting droplet: 《Microsystems & Nanoengineering》2020年第1期768-774,共7页Thanh-Vinh Nguyen Masaaki Ichiki; This work was supported by JSPS KAKENHI Grant Number 17H04903.; When a droplet impacts a(super-)hydrophobic surface,there is a range of Weber numbers within which bubble entrapment will occur during droplet recoil due to closure of the air cavity developed when the droplet spreads...; 关键词：BUBBLE RADIUS RESONANT

Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration被引量：6: 《Microsystems & Nanoengineering》2020年第1期165-175,共11页Xiangguang Han Qi Mao Libo Zhao Xuejiao Li Li Wang Ping Yang Dejiang Lu Yonglu Wang Xin Yan Songli Wang Nan Zhu Zhuangde Jiang; This work was supported in part by the National Natural Science Foundation of China(Grant Nos.51890884,51421004,and 91748207);the Key Research and Development Project of Shaanxi Province(Grant No.2018ZDCXL-GY-02-02);the Shaanxi Province Natural Science Basic Research Project(2019JC-06);the 111 Program(Grant No.B12016).; In this paper,a novel resonant pressure sensor is developed based on electrostatic excitation and piezoresistive detection.The measured pressure applied to the diaphragm will cause the resonant frequency shift of the ...; 关键词：RESONANT MODE anodic

Programmable synchronization enhanced MEMS resonant accelerometer被引量：8: 《Microsystems & Nanoengineering》2020年第1期654-663,共10页Liu Xu Shudong Wang Zhuangde Jiang Xueyong Wei; This work was financially supported by the National Key R&D Program of China(No.2018YFB2002303);Natural Science Foundation of China(No.51575439);Key Research and Development Program of Shaanxi Province(No.2018ZDCXL-GY-02-03)。; Acceleration measurement is of great significance due to its extensive applications in military/industrial fields.In recent years,scientists have been pursuing methods to improve the performance of accelerometers,part...; 关键词：RESONANT OSCILLATOR hence

RESONANT