Based on the technology of DC magnetron sputtering,the Vacuum Technology Group at IMP have developed a large-scale multi-target magnetron sputtering coating device.As shown in Fig.1,it is mainly composed of four parts...
supported by the National Natural Science Foundation of China(Nos.11975226,11905219);the Fundamental Research Funds for the Central Universities(No.WK2310000071);the National Key Research and Development Program of China(2016YFA0402004).
Non-evaporable getter(NEG)films are an integral part of many particle accelerators.These films provide conductance-free evenly distributed pumping,a low thermal outgassing rate,and a low photon-and electron-stimulated...