集成式压电驱动微操作手的位置控制研究  

Research on Position Control for Integrated Micromanipulator Driven Piezoelectric Ceramics

作　　者：孙立宁[1] 荣伟彬[1] 楼朝飞[1] 刘品宽[1] 蔡鹤皋[1] 

机构地区：[1]哈尔滨工业大学机器人研究所,哈尔滨150001

出　　处：《压电与声光》2002年第4期336-340,共5页Piezoelectrics & Acoustooptics

基　　金：国防基础科研项目

摘　　要：微操作手是微操作机器人的核心部件 ,文章介绍了作者研制的压电陶瓷管驱动三自由度集成式微操作手 ,在此基础上 ,研究了微操作手的位置闭环控制 ,提出了模糊 -比例积分控制方法 ,并通过实验获得了较好的控制效果。通过对微操作手进行动静态测试得到微操作手的性能指标 :操作手末端 X、Y轴的最大输出位移为± 8.5μm,重复定位精度为 2 8nm ,位移分辨率为 10 nm ,动态阶跃响应时间为 5 m s;Z轴最大输出位移为 6 .2μm ,重复定位精度为 17nm,位移分辨率为 4 nm ,动态阶跃响应时间为 5 m s。该微操作手能够实现纳米级微动定位 。Micromanipulator is the key component in a micromanipulating robot.A 3 degree of freedom integrated micromanipulator driven piezoelectric tube was introduced.Based on that,the position closed loop control was studied and a fuzzy PI control method was proposed.Experiment shows the control method was effective.Thanks to the static and dynamic test,some performances of the micromanipulator were investigated as follows.The travel of X and Y axes at the end of the manipulator is ±8.5 μm.The repeatability of X and Y axes reaches 28 nm and the resolution reaches 10 nm.The dynamic stepping response time of X and Y axes is 5 ms.The travel of Z axis is 6.2 μm.The repeatability of the Z axis reaches 17 nm and the resolution reaches 4 nm.The dynamic stepping response time of the Z axis is 5 ms.As a result,the micromanipulator can realize nanometer scale positioning.Therefore,it is fit to be applied in micromanipulation.

关 键 词：压电陶瓷管 微操作手 微操作机器人 位置控制 模糊-比例积分控制 压电驱动 机器人 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置]