supported by the National Natural Science Foundation of China (11172138, 10727201)
This paper studies the static deformation behavior of a piezoelectric micromachined ultrasonic transducer (PMUT) actuated by a strong external electric field. The transducer membrane consists of a piezoelectric laye...
supported by the National Natural Science Foundation of China(10772086 and 10727201);the National University of Singapore(R-265-000-140-112)
This paper presents a novel non-contact method for evaluating the resonant frequency of a microstructure, Firstly, the microstructure under test is excited by ultrasonic waves. This excitation method does not impose a...