Project supported by the National Natural Science Foundation of China(Nos.60806038,61131004,61274076);the National HighTechnology Research and Development Program of China(Nos.2006AA040102,2006AA040106)
This paper introduces a low-cost infrared absorbing structure for an uncooled infrared detector in a standard 0.5 m CMOS technology and post-CMOS process. The infrared absorbing structure can be created by etching the...