Funded by the Natural Science Foundation of China(No.10435060 andNo. 10675095)
Ti-Si-N composite coatings were synthesized on a novel combining cathode and middle-frequency magnetron sputtering system, designed on an industrial scale. Ti was produced from the arc target and Si from magnetron tar...
supported by the National Natural Science Foundation of China(No.10435060 and 10775109);the Specialized Research Fund for the Doctoral Program of Higher Education(No.20050486054 and 20070486069);the Young Chenguang Project of Wuhan City(No.200850731371)
Ion implantation is a powerful method for fabricating nanoparticles in dielectric. For the actual application of nanoparticle composites, a careful control of nanoparticles has to be achieved. In this letter, the size...