the Program for New Century Excellent Talents in Universities, MOE, China (No. NCET-05-0764);the Tackle Key Problems on Scientific Technology Foundation of Chongqing Municipality (Nos. CSTC2005AA4006-A6 and CSTC2004AC4034);the Natural Science Foundation of Chongqing Municipality (No. CSTC2005BA4016);China Postdoctoral Science Foundation (No. 2005037544);the Inno-base for Graduates of Chongqing University (No. 200506Y1B0240131).
Highly conductive and transparent Al-doped ZnO (AZO) thin films were prepared from a zinc target containing Al (1.5 wt.%) by direct current (DC) and radio frequency (RF) reactive magnetron sputtering. The stru...