POLYSILICON

作品数:64被引量:28H指数:2
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相关作者:高勇郑学仁余宁梅陈奕卫邓婉玲更多>>
相关机构:华东师范大学东京大学西安电子科技大学华南理工大学更多>>
相关期刊:《Frontiers in Heat and Mass Transfer》《Chinese Physics B》《China Chemical Reporter》《Journal of Energy Chemistry》更多>>
相关基金:国家自然科学基金国家高技术研究发展计划西安应用材料创新基金中国博士后科学基金更多>>
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Numerical Simulation of Heat Transfer Process and Heat Loss Analysis in Siemens CVD Reduction Furnaces
《Frontiers in Heat and Mass Transfer》2024年第5期1361-1379,共19页Kunrong Shen Wanchun Jin Jin Wang 
funded by the Natural Science Foundation Projects in Sichuan Province(No.2022NSFSC0254).
The modified Siemens method is the dominant process for the production of polysilicon,yet it is characterised by high energy consumption.Two models of laboratory-grade Siemens reduction furnace and 12 pairs of rods in...
关键词:Modified siemens method polysilicon reduction furnace energy consumption numerical simulation 
Low-thermal-budget electrically active thick polysilicon for CMOS-First MEMS-last integration
《Microsystems & Nanoengineering》2024年第3期395-407,共13页Aron Michael Ian Yao-Hsiang Chuang Chee Yee Kwok Kazuo Omaki 
support received from the School of Electrical Engineering&Telecommunications(EE)and UNSW Sydney.
Low-thermal-budget,electrically active,and thick polysilicon films are necessary for building a microelectromechanical system(MEMS)on top of a complementary metal oxide semiconductor(CMOS).However,the formation of the...
关键词:BUDGET THICK THERMAL 
Microstructure of electronic-grade polycrystalline silicon core-matrix interface
《Journal of Advanced Dielectrics》2024年第3期11-17,共7页Bochen Lu Yuxuan Yang Yang Zhang Rong Qin Xinlu Xue Jinyue Peng Haijun Wu 
support of the unveiling project of“Application Research on Carbon and Other Trace Impurities and Microstructure Characterization Technology on the Surface of Electronic Grade Polysilicon”by Qinghai Xince Technology Co.,Ltd.of the Huanghe Hydropower Development Co.,Ltd.,project number:XCKJ-FY(2024)No.1(total No.25).
This paper focuses on the problems encountered in the production process of electronic-grade polycrystalline silicon.It points out that the characterization of electronic-grade polycrystalline silicon is mainly concen...
关键词:POLYSILICON silicon core MATRIX INTERFACE metallographic microscopy EBSD 
Microstructure evolution from silicon core to surface in electronic-grade polycrystalline silicon
《Journal of Advanced Dielectrics》2024年第3期18-26,共9页Jinyue Peng Yuxuan Yang Yang Zhang Xinlu Xue Bochen Lu Rong Qin Haijun Wu 
support from the unveiling project by Qinghai Xince Technology Co.,Ltd.,Huanghe Hydropower Development Co.,Ltd.,Project No.XCKJ-FY(2024)No.1(total No.25).
Large-size electronic-grade polycrystalline silicon is an important material in the semiconductor industry with broad application prospects.However,electronic-grade polycrystalline silicon has extremely high requireme...
关键词:POLYSILICON silicon core matrix interface SURFACE metallographic microscopy EBSD 
Numerical simulation of granular silicon growth and silicon fines formation process in polysilicon fluidized bed被引量:1
《Particuology》2024年第4期74-86,共13页Guangkai Gu Guoqiang Lv Wenhui Ma Shanlin Du Boqiang Fu 
support by the Science and Technology Planning Project of the Science and Technology Department of Yunnan Province (grant No.202002AB080002 and 202202AB080014).
Operating conditions strongly affect the yield and quality of polysilicon in a polysilicon fluidized bed.In this study,a new model of polysilicon fluidized bed was established using the Euler-Euler model coupled with ...
关键词:Polysilicon fluidized bed Particle growth Fines CFD Population balance model(PBM) 
SiC gate-controlled bipolar field effect composite transistor with polysilicon region for improving on-state current
《Chinese Physics B》2023年第4期657-662,共6页段宝兴 罗开顺 杨银堂 
Project supported in part by the Science Foundation for Distinguished Young Scholars of Shaanxi Province,China(Grant No.2018JC-017);111 Project(Grant No.B12026)。
A novel silicon carbide gate-controlled bipolar field effect composite transistor with poly silicon region(SiC GCBTP)is proposed.Different from the traditional electrode connection mode of SiC vertical diffused MOS(VD...
关键词:Si C power device on-state current BIPOLAR vertical diffused MOS(VDMOS) insulated gate bipolar transistor(IGBT) 
Research on Improvement of Static Power Consumption of 90nm Embedded Flash Memory Chip
《外文科技期刊数据库(文摘版)工程技术》2022年第12期065-070,共6页LINGZhouxuan SUNQi JIAXuemei LIANGXiao 
Based on the electrical monitoring parameter analysis, physical failure (hot spot) analysis and yield graphics and process characteristics, suspect the subthreshold leakage of kernel device (Core Device) and static re...
关键词:static power consumption subthreshold leakage optical resistance morphology static register gate polysilicon deposition physical failure analysis 
A Two-Scale Multi-Physics Deep Learning Model for Smart MEMS Sensors
《Journal of Materials Science and Chemical Engineering》2021年第8期41-52,共12页José Pablo Quesada-Molina Stefano Mariani 
Smart materials and structures, especially those bio-inspired, are often characterized by a hierarchy of length- and time-scales. Smart Micro Electro-Mechanical Systems (MEMS) are als...
关键词:Machine Learning Artificial Neural Networks Polysilicon MEMS Uncer-tainty Quantification Lorentz Force Magnetometer 
Organic field-effect transistor floating-gate memory using polysilicon as charge trapping layer
《Chinese Physics B》2019年第8期282-286,共5页Wen-Ting Zhang Fen-Xia Wang Yu-Miao Li Xiao-Xing Guo Jian-Hong Yang 
In this study,we present an organic field-effect transistor floating-gate memory using polysilicon(poly-Si)as a charge trapping layer.The memory device is fabricated on a N^+-Si/SiO2 substrate.Poly-Si,polymethylmethac...
关键词:organic FLOATING-GATE MEMORY POLYSILICON FLOATING-GATE MEMORY WINDOW 
Hydrodynamics of Continuous Spiral Dryer with Rotatory Conical Sleeves: Experiments versus CFD Simulations
《Transactions of Tianjin University》2017年第6期511-520,共10页Xiaojing Wang Yuankui Li Dongyun Ma Yaqian Liu Yiping Huang Fengxiang Qin 
In this study, a continuous and airtight twin-spiral dryer was developed in accordance with the characteristics and challenges in the process of disposing polysilicon slurry. Computational fluid dynamics (CFD) simulat...
关键词:Dryers (equipment) Flow fields Fluid dynamics Inlet flow Polycrystalline materials POLYSILICON Residence time distribution Velocity 
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