supported by National Natural Science Foundation of China(Grant No.11165012,Grant No. 11665012);the Project of the Natural Science Foundation of GanSu(145RJZA159)
The deposition of organosilicone thin films from hexamethyldisiloxane(HMDSO) by using a dual-frequency (50 kHz/33 MHz) atmospheric-pressure micro-plasma jet with an admixture of a small volume of HMDSO and Ar was ...
This research was funded by the National Science Council (NSC 90-2212-E- 212-015)
This study is using HMDSA (C6H19NSi2) or HMDSO (C6H18OSi2) vapor into C3H8/air premixed flames to form SiO2 thin film on the surface of an aluminum plate. With the addition of HMDSO or HMDSA to premixed flames, an ora...