转动竖直镜面的微机械光开关  

Fiber optic switches based on MEMS vertical rotation mirror

作　　者：杨艺榕[1] 刘文平[1] 王跃林[1] 吴亚明[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050

出　　处：《科技通讯（上海）》2004年第1期54-58,共5页

基　　金：国家重点基础研究发展规划项目(973)"集成微光机电系统研究"(No.G1999033104)

摘　　要：提出并制作了转动竖直微镜的微机械光开关,采用曲线形状的电极设计,有效地减低了悬臂梁驱动器的吸合电压,采用体硅深刻蚀技术结合(110)硅的各向异性腐蚀技术制备了光开关芯片和耦合对准的U形槽和卡簧。芯片经初步封装后进行了电学测试和光学测试,测得吸合电压78.5V,谐振频率2.3kHz,光开关损耗5dB,隔离度45dB。A novel MEMS optical switch was designed and fabricated,which performs switching function by rotating vertical micro mirror.T he use of curve shape electrode reduces the pull -in voltage of canti -lever driver effectively.The combi nations of deep reactive ion etching technology and anisotropic etching of(110)silicon wafer make switch chips with aligning accessories.The device wa s tested to get electric and optical performances.The resul ts show that the driver' s pull -in voltage is 78.5V,resonance fre -quency is 2.3kHz,the device' s optical insertion loss is 5dB and crosstalk is 45dB.

关 键 词：各向异性腐蚀 深反应离子刻蚀 MEMS 光开关 微机械 静电耦合分析 有限元 

分 类 号：TN256[电子电信—物理电子学]