supported by the National Basic Re-search Program of China (No. 2004CB619302) ;the National Natural Science Foundation of China (No.50871083, 50771078 and 50771069)
Tungsten (W) thin films were prepared by magnetron sputtering onto Si (100) substrates. Their microstructures were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM)...