This work is supported by National Natural Science Foundationof China.(Grant No. 60275012);Natural Science Research Foundof Higher Education in Guangdong Province (Grant No. 04Z010);the Natural Science Foundation of Guangdong Province (GranNo. 06028584) ;the Research Project of Science & Technol-ogy from Shenzhen Government (Grant No.200619).
This letter addresses several key issues in the process of model-based optical metrology, including three dimensional (3D) sensing, calibration, registration and fusion of range images, geometric representation, and v...