supported by the National Basic Research Program of China (2009CB220100);the Key International S&T Cooperation Projects of China (2010DFB63370);the National High-tech R&D Program of China (2011AA11A256);New Century Educational Talents Plan of Chinese Ministry of Education (NCET-10-0038);Beijing Novel Program (2010B018)
We prepared a series of lithium lanthanum titanate(LLTO) thin film electrolytes by radio frequency(RF) magnetron sputtering using LLTO targets in a N2 atmosphere.We also deposited the LLTO thin films in an Ar atmosphe...