the National Natural Science Foundation of China(Grant Nos.12105340,12035019,and12075290);the Youth Innovation Promotion Association of the Chinese Academy of Sciences(Grant No.2020412)。
Heavy ion irradiation effects on charge trapping memory(CTM)capacitors with TiN/Al_(2)O_(3)/HfO_(2)/Al_(2)O_(3)/HfO_(2)/SiO_(2)/p-Si structure have been investigated.The ion-induced interface charges and oxide trap ch...