云南高校图书馆联盟文献共享服务平台- MEMS

MEMS: 作品数：5499被引量：11021H指数：29; 导出分析报告; 相关领域：电子电信自动化与计算机技术更多>>; 相关作者：黄庆安苑伟政张国军张文栋刘理天更多>>; 相关机构：东南大学中北大学上海交通大学中国科学院更多>>; 相关期刊：更多>>; 相关基金：国家自然科学基金国家高技术研究发展计划国家重点基础研究发展计划中国博士后科学基金更多>>

Design and characterization of a multi-ring nested CMUT array for hydrophone: 《Journal of Semiconductors》2024年第11期58-62,共5页Licheng Jia Rihui Xue Fansheng Meng; supported in part by the National Natural Science Foundation of China under Grant 61927807,62320106011,and 62304208;China Postdoctoral Science Foundation under Grant 2023M733277 and2024T170848。; This paper presents the design,fabrication,packaging,and characterization of a high-performance CMUT array.The array,which features rectangular cells fabricated using a sacrificial release process,achieves a receiving...; 关键词：cmut array mirco-electro-mechanical systems(mems) receiving sensitivity non-linearity

A mechanically coupled MEMS filter with high-Q width extensional mode resonators: 《Journal of Semiconductors》2024年第8期41-48,共8页Wei Wang Wenli Liu Junyuan Zhao Bo Niu Zeyu Wu Yinfang Zhu Jinling Yang Fuhua Yang; supported by the National Natural Science Foundation of China(61734007);National Key Research and Development Program of China(2022YFF0706100).; This work presents a novel radio frequency(RF)narrowband Si micro-electro-mechanical systems(MEMS)filter based on capacitively transduced slotted width extensional mode(WEM)resonators.The flexibility of the plate lead...; 关键词：MEMS narrowband filter mechanically coupling quality factor width extensional mode

Microcantilever sensors for biochemical detection被引量：2: 《Journal of Semiconductors》2023年第2期66-76,共11页Jingjing Wang Baozheng Xu Yinfang Zhu Junyuan Zhao; supported by National Science Foundation of China(61804107,61804150);National Key Research and Development Program of China(2022YFF0706102);Tianjin Municipal Science and Technology Bureau(20JCQNJC00180).; Microcantilever is one of the most popular miniaturized structures in micro-electromechanical systems(MEMS).Sensors based on microcantilever are ideal for biochemical detection,since they have high sensitivity,high th...; 关键词：MICROCANTILEVER SENSOR biochemical detection MEMS

The effect of parasitic charge on the output stability of MEMS gyroscopes: 《Journal of Semiconductors》2018年第8期47-52,共6页Nan Liu Yan Su Xin Tong Guowei Han Chaowei Si Zhaofeng Li Jin Ning; supported by the National Natural Science Foundation of China(No.61504130); Output voltage drifting was observed in MEMS gyroscopes. Other than the quadrature error, frequency mismatch and quality factor, the dielectric parasitic charge was thought to be a major determinant. We studied the me...; 关键词：dielectric parasitic charge micro-electro-mechanical system(MEMS) gyroscopes frequency drift DC voltage

Application research on the sensitivity of porous silicon被引量：1: 《Journal of Semiconductors》2017年第9期48-55,共8页Gaobin Xu Ye Xi Xing Chen Yuanming Ma; Applications based on sensitive property of porous silicon （PSi） were researched. As a kind of porous material, the feasibility of PSi as a getter material was studied. Five groups of samples with different paramete...; 关键词：porous silicon MEMS humidity sensor gas sensing

Study on the failure temperature of Ti/Pt/Au and Pt_5Si_2–Ti/Pt/Au metallization systems被引量：1: 《Journal of Semiconductors》2017年第9期99-102,共4页Jie Zhang Jianqiang Han Yijun Yin Lizhen Dong Wenju Niu; supported by the National Natural Science Foundation of China(No.61376114); The Ti/Pt/Au metallization system has an advantage of resisting KOH or TMAH solution etching. To form a good ohmic contact, the Ti/Pt/Au metallization system must be alloyed at 400℃. However, the process temperatures...; 关键词：Ti/Pt/Au metallization system PACKAGING ohmic contacts MEMS

A review: aluminum nitride MEMS contour-mode resonator被引量：1: 《Journal of Semiconductors》2016年第10期1-9,共9页侯云虹张萌韩国威司朝伟赵咏梅宁瑾; Project supported by National Natural Science Foundation (Nos. 61274001, 61234007, 61504130);the Nurturing and Development Special Projects of Beijing Science and Technology Innovation Base’s Financial Support (No. Z131103002813070);the National Defense Science and Technology Innovation Fund of CAS (No. CXJJ-14-M32); Over the past several decades, the technology of micro-electromechanical system（MEMS） has advanced. A clear need of miniaturization and integration of electronics components has had new solutions for the next genera...; 关键词：MEMS contour-mode resonator AlN magnetron sputtering inductively coupled plasma（ICP） etching the temperature stability quality factor（Q）

Application of the thermoelectric MEMS microwave power sensor in a power radiation monitoring system被引量：2: 《Journal of Semiconductors》2016年第8期60-62,共3页高波杨晶蒋思王德波; supported by the National Natural Science Foundation of China(No.11304158);the Province Natural Science Foundation of Jiangsu(No.BK20140890);the Open Research Fund of the Key Laboratory of MEMS of Ministry of Education,Southeast University(No.3206005302);the Scientific Research Foundation of Nanjing University of Posts and Telecommunications(Nos.NY213024,NY215139); A power radiation monitoring system based on thermoelectric MEMS microwave power sensors is studied. This monitoring system consists of three modules： a data acquisition module, a data processing and display module, ...; 关键词：THERMOELECTRIC MEMS power sensor power radiation monitoring system

The design and analysis of a MEMS electrothermal actuator: 《Journal of Semiconductors》2015年第4期90-94,共5页王锁成郝永平刘双杰; This paper introduces a type of out-of-plane microelectrothermal actuator, which is based on the principle of bimetal film thermal expansion in the fuse. A polymer SU-8 material and nickel are used as the functional a...; 关键词：bimetal film electrothermal actuator thermal expansion SU-8 Coventorware stress check

The dual cycle bridge detection of piezoresistive triaxial accelerometer based on MEMS technology被引量：3: 《Journal of Semiconductors》2014年第6期80-89,共10页张娟婷何常德张慧李玉平张永平杜春晖张文栋; Project supported by the National Science and Technology Cooperation Program of China(No.61011140351);the Special Fund of the National Natural Science Foundation of China(No.61127008); A cycle bridge detection method, which uses a piezoresistive triaxial accelerometer, has been described innovatively. This method just uses eight resistors to form a cycle detection bridge, which can detect the signal...; 关键词：PIEZORESISTIVE triaxial accelerometer cycle detection bridge MEMS

MEMS