supported by National Basic Research Program of China(973 Program, Grant No. 2009CB724205);National Hi-tech Research and Development Program of China(863 Program, Grant No. 2009AA04Z148);Independent Research Program of the State Key Laboratory of Tribology of China(Grant No. SKLT08B04)
Magnetically levitated stages(MLS) have potentials to obtain good motion performances in high vacuum environment. Yet the electromagnetic forces/torques corresponding to six degrees of freedom(DOF) motions have co...