Project supported by Hi-Tech Research and Development Program of China (Grant No 2007AA05Z436);Science and Technology Support Project of Tianjin (Grant No 08ZCKFGX03500);National Basic Research Program of China (Grant Nos 2006CB202602 and 2006CB202603);National Natural Science Foundation of China (Grant No 60506003);Starting Project of Nankai University (Grant No J02031);International Cooperation Project Between China-Greece Government (Grant No 2006DFA62390);Program for New Century Excellent Talents in University of China (NCET)
This paper studies boron contamination at the interface between the p and i layers of μc-Si:H solar cells deposited in a single-chamber PECVD system. The boron depth profile in the i layer was measured by Secondary ...
supported by the National Basic Research Program of China(Grant No.2006CB202602,2006CB202603);the National High Technology Research and Development Program of China(Grant No.2007AA05Z436);the National Natural Science Foundation of China(Grant No.60506003)
Modulation frequency and pulse duty cycle are two key parameters of pulsed VHF-PECVD technology.An experimental study on the microcrystalline silicon materials prepared by pulsed VHF-PECVD technology in high depositio...