Supported by the National Natural Science Foundation of China(61273346);the National Defense Major Fundamental Research Program of China(20110003);the National Defense Key Fundamental Research Program of China(20132010);Specialized Research Fund for the Doctoral Program of Higher Education(20121101120009);Excellent Young Scholars Research Fund of Beijing Institute of Technology(2012YG0203);the Program for the Fundamental Research of Beijing Institute of Technology(2015CX02034)
A triaxial high-g accelerometer of microelectro mechanical systems (MEMS) has a struc- ture of multi-chips combination and will be used in aerospace field, civil and military fields. The ac- celerometer can measure ...