Project supported by the National Natural Science Foundation of China(Grant No.51672246);the National Key Research and Development Program of China(Grant Nos.2017YFA0304302 and 2020AAA0109003);the Key Research and Development Program of Zhejiang Province,China(Grant No.2021C01002)。
The magnetoresistive random access memory process makes a great contribution to threshold voltage deterioration of metal-oxide-silicon field-effect transistors,especially on p-type devices.Herein,a method was proposed...